I think out of the 3 you mentioned, I'd take Ward personally. He's always been a rock too. Carolina has been struggling, but Ward is much younger and the most proven. He's also a workhorse.
Varlamov would probably be next just because he's young, has shown to be good and I feel Colorado is a very solid up-and-coming team once they all get healthy. My only question with Varlamov is his durability. If he can go a few seasons without any major injury issues, I think he rises to the top of that list.
16-Team Dynasty Keeper League H2H (C-3, LW-3, RW-3, F-2, D-6, G-1)
6x4 standard categories (G, A, +/-, PIM, PPP's, SOG; W, SV%, GAA, SO)
C - Getzlaf, Kesler, Zajac, Matthias
LW - C. Wilson, Parise, Prospal, Couture
RW - Perry, Ryder, Erat, Michalek, Okposo, Frolik, Chiasson
D - Green, Nikitin, Pitkanen, Sbisa, Tyutin, Fowler, M. Weber
G - Varlamov, Neuvirth, Holtby, Allen, Halak
F - Morin, Sheahan, Panik, C. Thomas, T. Johnson, Hart, Arcobello, Audy-Marchessault, Beck, Palat
D - Lindholm, Elliott, Brennan
G - Desjardins, Poulin & Zatkoff